Utility Model Patent No. 142744

The utility model relates to measuring equipment, namely, electrostatic filters for linear scanning of charged particle fluxes distributed in space, and can be used in energy analyzers and charged particle mass analyzers of high sensitivity, speed and accuracy.

An electrostatic filter for linear scanning of streams of charged particles distributed in space contains two rows of cylindrical electrodes separated by a gap, the axes of which are parallel to each other, located in the same plane and equidistant from each other, while the axes of the cylindrical electrodes of the first row coincide with the axes of the cylindrical electrodes of the second row, and three pairs of collimating plates forming a gap in each pair,and located parallel to each other and to the plane of arrangement of cylindrical electrodes, with one pair of collimating plates located on one side of the cylindrical electrodes, through the gap in which the beam of charged particles enters, and on the other side, two pairs, through the gap in which the beam is removed.

Cylindrical electrodes are connected to a source of deflecting electric potentials, while deflecting potentials have the same magnitude and opposite polarity in each row of electrodes on both sides of the formed region of weak scattering, and deflecting potentials of opposite polarity are applied to the coaxial electrodes. The filter makes it possible to provide an almost infinitely narrow area of ​​the scanning window while maintaining uniform transmission of charged particles over the gap width of this area, which leads to an increase in the spatial resolution of the system and its transmission.

The technical result achieved by the utility model consists in increasing the spatial resolution of the filter without changing the relative position of the rows of electrodes and in increasing the filter transmission.

The claimed technical result is achieved in an electrostatic filter for linear scanning of streams of charged particles distributed in space, containing two rows of cylindrical electrodes separated by a gap, the axes of which are parallel to each other, located in the same plane and equidistant from each other, and three pairs of collimating plates forming a gap in each pair, and located parallel to each other and the plane of location cylindrical electrodes, with one pair of collimating plates located on one side of the cylindrical electrodes, through the gap in which a beam of charged particles enters, and on the other side, two pairs, through the gap in which the beam is removed, while the cylindrical electrodes are connected to a source of deflecting electric potentials , forming a region of weak scattering, in which, according to the useful model, the axes of the cylindrical electrodes of the first row coincide with the axes of the cylindrical electrodes of the second row, the deflecting potentials have the same magnitude and opposite polarity in each row of electrodes on both sides of the formed region of weak scattering, and to the coaxial electrodes deflection potentials of opposite polarity are applied.